MEMS have feature sizes ranging from micrometers to millimeters. To see how small that is, consider that a regular sheet of paper is between 70 and 180 micrometers thick. A mite, less than 1 mm in ...

This is an example of a MEMS device whose accurate resonant frequency was measured by the harmonic distortion technique. Disclaimer: AAAS and EurekAlert! are not responsible for the accuracy of ...

As a result, this application relies on 'sensorless' AO techniques, in which an optimization scheme iteratively reshapes the DM and then measures the resulting image quality. MEMS DMs have proved ...